Fanelli, Fiorenza and d'Agostino, Riccardo and Fracassi, Francesco (2011) GC‐MS Investigation of Hexamethyldisiloxane–Oxygen Fed Cold Plasmas: Low Pressure Versus Atmospheric Pressure Operation. Plasma Processes and Polymers, 8 (10). pp. 932-941. ISSN 1612-8850
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Abstract
This study deals with the investigation by means of gaschromatography-mass spectrometry of the exhaust gas of a rf low pressure glow discharge and of an atmospheric pressure filamentary DBD fed with HMDSO, O2 and Ar. The influence of feed composition on monomer depletion and on the quali-quantitative distribution of stable by-products formed by recombination of plasma intermediates is investigated. Without O2 addition to the feed almost comparable values of HMDSO depletion are observed both at low and atmospheric pressure. Oxygen addition does not influence the monomer depletion at low pressure while it induces a slight decrease of the depletion at atmospheric pressure. Whatever the working pressure, O2 controls the overall chemistry of the plasma, since it influences the concentration of by-products (e.g. silanes, silanols, linear and cyclic methylsiloxanes). At atmospheric pressure evidences of the importance of methyl abstraction from HMDSO molecule have been obtained, while at low pressure the prevalence of Si-O bond rupture, of fragmentation and oligomerization reactions is observed. The comparison of results from the GC-MS investigation of the exhaust gas with FT-IR spectra of the deposited coatings allows to enhance hypotheses on the formation of silanols in the gas phase and in the deposit.
| Item Type: | Article |
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| Subjects: | 500 Scienze naturali e Matematica > 500.2 Scienze fisiche 500 Scienze naturali e Matematica > 540 Chimica e scienze connesse |
| Depositing User: | Fiorenza Fanelli |
| Date Deposited: | 26 Jan 2024 12:44 |
| Last Modified: | 26 Jan 2024 12:44 |
| URI: | http://eprints.bice.rm.cnr.it/id/eprint/22640 |
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