Fanelli, Fiorenza and Fracassi, Francesco and d'Agostino, Riccardo (2005) Deposition of Hydrocarbon Films by Means of Helium‐Ethylene Fed Glow Dielectric Barrier Discharges. Plasma Processes and Polymers, 2 (9). pp. 688-694. ISSN 1612-8850
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Fanelli et al_Ethylene_POSTPRINT.pdf - Accepted Version Available under License Creative Commons Attribution Non-commercial No Derivatives. Download (2MB) | Preview |
Abstract
The present work provides a detailed study of helium-ethylene dielectric barrier glow discharges. The effect of ethylene concentration, total gas flow rate, excitation frequency and applied voltage have been investigated in order to clarify both discharge operational mode, and coating composition. The discharge has been characterized by means of electrical measurements and optical emission spectroscopy, while the stable species contained in the gas effluent have been sampled and analyzed using gas chromatography with mass spectrometry detection to achieve indications on the reactive fragments generated inside the discharge. It has been observed that polyethylene-like coatings can be obtained for a wide range of electrical conditions, and the deposition rates have been found to range between 20 and 80 nm.min-1.
| Item Type: | Article |
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| Uncontrolled Keywords: | atmospheric pressure glow discharges (APGD); glow dielectric barrier discharges (GDBD); ethylene; plasma enhanced chemical vapor deposition (PECVD) |
| Subjects: | 500 Scienze naturali e Matematica > 500.2 Scienze fisiche 500 Scienze naturali e Matematica > 540 Chimica e scienze connesse |
| Depositing User: | Fiorenza Fanelli |
| Date Deposited: | 26 Jan 2024 12:49 |
| Last Modified: | 26 Jan 2024 12:49 |
| URI: | http://eprints.bice.rm.cnr.it/id/eprint/22648 |
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