Deposition of Hydrocarbon Films by Means of Helium‐Ethylene Fed Glow Dielectric Barrier Discharges

Fanelli, Fiorenza and Fracassi, Francesco and d'Agostino, Riccardo (2005) Deposition of Hydrocarbon Films by Means of Helium‐Ethylene Fed Glow Dielectric Barrier Discharges. Plasma Processes and Polymers, 2 (9). pp. 688-694. ISSN 1612-8850

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The present work provides a detailed study of helium-ethylene dielectric barrier glow discharges. The effect of ethylene concentration, total gas flow rate, excitation frequency and applied voltage have been investigated in order to clarify both discharge operational mode, and coating composition. The discharge has been characterized by means of electrical measurements and optical emission spectroscopy, while the stable species contained in the gas effluent have been sampled and analyzed using gas chromatography with mass spectrometry detection to achieve indications on the reactive fragments generated inside the discharge. It has been observed that polyethylene-like coatings can be obtained for a wide range of electrical conditions, and the deposition rates have been found to range between 20 and 80 nm.min-1.

Item Type: Article
Uncontrolled Keywords: atmospheric pressure glow discharges (APGD); glow dielectric barrier discharges (GDBD); ethylene; plasma enhanced chemical vapor deposition (PECVD)
Subjects: 500 Scienze naturali e Matematica > 500.2 Scienze fisiche
500 Scienze naturali e Matematica > 540 Chimica e scienze connesse
Depositing User: Fiorenza Fanelli
Date Deposited: 26 Jan 2024 12:49
Last Modified: 26 Jan 2024 12:49

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