Photonic devices based on preferential etching

Bellini , Bob and Larchanché, Jean-François and Jean-Pierre , Vilcot and Decoster, Didier and Beccherelli, Romeo and d’Alessandro, Antonio (2005) Photonic devices based on preferential etching. Applied Optics , 44 (33). pp. 7181-7186. ISSN 0003-6935

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Abstract

We introduce a design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates. Low-loss waveguides, spot-size converters, and power dividers have been obtained with polymers. We have also aligned liquid crystals in the waveguides and demonstrated guided propagation. Therefore this technology is a suitable platform for soft-matter photonics and heterogeneous integration

Item Type: Article
Subjects: 500 Scienze naturali e Matematica > 500.2 Scienze fisiche
Depositing User: Danilo Dezzi
Date Deposited: 02 Jan 2013 12:46
Last Modified: 02 Jan 2013 12:46
URI: http://eprints.bice.rm.cnr.it/id/eprint/4458

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