The MEMS project

Battiston, R. (2007) The MEMS project. Il nuovo cimento C, 30 (5). pp. 449-461. ISSN 1826-9885

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Abstract

We report on the results of the first three years of the INFN/FBK-irst “MEMS Project”, a program aiming to develop innovative silicon-based radiation detectors using MEMS-like technologies.

Item Type: Article
Additional Information: Paper presented at the 1st Workshop on Photon Detection for High Energy Medical and Space Applications; Perugia, June 13-14, 2007.
Uncontrolled Keywords: Radiation detectors ; Tracking and position-sensitive detectors ; Solid-state detectors
Subjects: 500 Scienze naturali e Matematica > 530 Fisica
Depositing User: Marina Spanti
Date Deposited: 20 Mar 2020 17:41
Last Modified: 20 Mar 2020 17:41
URI: http://eprints.bice.rm.cnr.it/id/eprint/16281

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