Fanelli, Fiorenza (2009) Optical Emission Spectroscopy of Argon–Fluorocarbon–Oxygen Fed Atmospheric Pressure Dielectric Barrier Discharges. Plasma Processes and Polymers, 6 (9). pp. 547-554. ISSN 1612-8850
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Abstract
Atmospheric pressure Filamentary Dielectric Barrier Discharges (FDBDs) fed with argon, a fluorocarbon compound (i.e. CF4, C3F8, C3F6 and c-C4F8) and O2 were investigated by Optical Emission Spectroscopy (OES). The Ultra Violet-Visible (UV-Vis) spectra of the plasma in argonfluorocarbon mixtures are characterized by narrow signals from Ar atoms, CF2 and CF fragments and by two continua due to CF2+ and CF3. O2 addition to the feed gas reduces the emissions of fluorocarbon fragments and results in the appearance of an intense narrow emission at 193 nm and of a broad continuum centred at 290 nm ascribed to ArF and Ar2F excimers, respectively. Any signal from F atoms was not detected under the experimental conditions investigated even though the plasma contains F atoms since the dry etching of silicon substrates, a typical process driven by F atoms, was observed. Some possible explanations of this phenomenon are presented.
| Item Type: | Article |
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| Uncontrolled Keywords: | Atmospheric Pressure, Dielectric Barrier Discharge (DBD), fluorocarbons, Optical Emission Spectroscopy (OES), excimers |
| Subjects: | 500 Scienze naturali e Matematica > 500.2 Scienze fisiche 500 Scienze naturali e Matematica > 540 Chimica e scienze connesse |
| Depositing User: | Fiorenza Fanelli |
| Date Deposited: | 15 Jan 2024 14:39 |
| Last Modified: | 15 Jan 2024 14:39 |
| URI: | http://eprints.bice.rm.cnr.it/id/eprint/22604 |
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