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Fanelli, Fiorenza and Lovascio, Sara and d'Agostino, Riccardo and Fracassi, Francesco (2012) Insights into the Atmospheric Pressure Plasma‐Enhanced Chemical Vapor Deposition of Thin Films from Methyldisiloxane Precursors. Plasma Processes and Polymers, 9 (11-12). pp. 1132-1143. ISSN 1612-8850