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Fanelli, Fiorenza and Fracassi, Francesco and d'Agostino, Riccardo (2010) Deposition and etching of fluorocarbon thin films in atmospheric pressure DBDs fed with Ar–CF4–H2 and Ar–CF4–O2 mixtures. Surface and Coatings Technology, 204 (11). pp. 1779-1784. ISSN 02578972

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